parylene Dry Lift-Off

Researchers developed a parylene-based dry lift-off technique for high-resolution micropatterning of quantum dot (QD) films in optoelectronic devices

[{"selector":"#anim-28e9235c-6d53-4ec9-8587-490040c8448c [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-8f799da7-ff3e-4e56-a361-ab1ef2ec313a","keyframes":{"opacity":[0,1]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-3df5e78a-1fbe-45ee-96ff-f30efc9476bb","keyframes":{"transform":["scale(0.3333333333333333)","scale(1)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"forwards"}]

The process uses a parylene intermediate layer, applied by chemical vapor deposition, as a buffer for photolithographic patterning

[{"selector":"#anim-266a2e18-9a62-431a-a10a-de0de42952b0 [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(-12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-4d91119e-6c8b-4189-97f3-4a581c93c18b","keyframes":{"opacity":[0,1]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-7f6a364d-71ff-4663-8f6a-64fb14121de0","keyframes":{"transform":["scale(0.3333333333333333)","scale(1)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"forwards"}]

Standard photolithography and plasma etching define the pattern on the parylene layer, which is then mechanically peeled off to remove unwanted QDs

[{"selector":"#anim-4ccbccb3-3976-40d5-8413-e470e1f1d4ce [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(-12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-2cbc6cdd-011d-4b80-b509-4a7078742837","keyframes":{"opacity":[0,1]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-6303e017-3a80-4cd7-b845-7cc4f1d06020","keyframes":{"transform":["scale(0.3333333333333333)","scale(1)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"forwards"}]

The technique enables QDs to be deposited as the final step, maintaining their narrow emission linewidth and high photoluminescence

[{"selector":"#anim-c5b03156-20f6-441b-97d1-d54148209fd6 [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(-12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-02a35812-e0c9-4c00-b6e5-0106d61775b7","keyframes":{"opacity":[0,1]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-7b6e94f8-e1a7-4fdd-a5f1-d33ca23e4976","keyframes":{"transform":["scale(0.3333333333333333)","scale(1)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"forwards"}]

Achieved pattern resolutions are as fine as 1 µm, suitable for advanced micro-display and optoelectronic applications

[{"selector":"#anim-ff6311b9-fd07-411e-b1f2-89aa8c6524a6 [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-0559bf84-7060-4524-a0cb-af993051e103","keyframes":{"transform":["translate3d(118.66668%, 0px, 0)","translate3d(0px, 0px, 0)"]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"both"}] [{"selector":"#anim-7c0791e8-3727-401a-9665-e1885ad571f1","keyframes":{"opacity":[0,1]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"both"}] [{"selector":"#anim-fd608593-8899-4bab-96f6-b276c6c72051","keyframes":{"transform":["scale(0.15)","scale(1)"]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"forwards"}]

Multi-color patterning is possible by repeating the process with different QD types, enabling integration of red and green QDs on a single substrate

[{"selector":"#anim-0dec017a-4479-425d-ad8f-32aff25a5028 [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(-12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-7e4d4f14-b362-4f3d-924e-ba7513c778f2","keyframes":{"transform":["translate3d(-115.55555%, 0px, 0)","translate3d(0px, 0px, 0)"]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"both"}] [{"selector":"#anim-c69a72f5-54d6-4067-a401-e8a5ac5f57bc","keyframes":{"opacity":[0,1]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"both"}] [{"selector":"#anim-765afd9b-a49c-48c3-985c-71fd3e9a664b","keyframes":{"transform":["scale(0.15)","scale(1)"]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"forwards"}]

The method was successfully integrated with blue GaN LED substrates, enabling high-resolution QD color converters for displays

[{"selector":"#anim-8af3fc65-4d4c-473b-89e2-d56900d04dd9 [data-leaf-element=\"true\"]","keyframes":{"transform":["translate3d(12.514648210040342%, 0, 0)","translate3d(0%, 0, 0)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"both"}] [{"selector":"#anim-d158db96-906c-4a06-b250-47f444b93dba","keyframes":{"transform":["translate3d(115.55555%, 0px, 0)","translate3d(0px, 0px, 0)"]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"both"}] [{"selector":"#anim-3e95966a-7974-4379-9be7-f4914ece927d","keyframes":{"opacity":[0,1]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"both"}] [{"selector":"#anim-bbc07f42-dae6-4540-bf38-f0e434022ae2","keyframes":{"transform":["scale(0.15)","scale(1)"]},"delay":0,"duration":600,"easing":"cubic-bezier(0.4, 0.4, 0.0, 1)","fill":"forwards"}]

For more details visit Govindhtech.com

[{"selector":"#anim-a8ce54a0-3205-4f84-8e32-23fa8f72933d [data-leaf-element=\"true\"]","keyframes":{"transform":["translate(0%, 0%) scale(1.5)","translate(0%, 0%) scale(1)"]},"delay":0,"duration":2000,"easing":"cubic-bezier(.3,0,.55,1)","fill":"forwards"}]